An alternative to angle lap and stain analysis of Gaussian diffusions

The junction depth and surface concentration for a Gaussian diffusion into a known uniform background can be determined by measuring the depletion layer capacitance and the sheet resistance. A family of sheet resistance versus depletion layer capacitance curves is computed. They facilitate the direct conversion of experimental data to diffusion data. The technique offers a fast, accurate, nondestructive technique for the analysis of Gaussian diffusions.