DocumentCode

1063968

Title

Automatic laser inspection/laser repair system for masks

Author

Fehrs, D. ; Munro, Deborah ; Cuthbert, J. ; Yanochko, G.

Author_Institution

Bell Telephone Laboratories, Inc., Allentown, PA, USA

Volume

11

Issue

9

fYear

1975

fDate

9/1/1975 12:00:00 AM

Firstpage

843

Lastpage

843

Keywords

Glass; High speed optical techniques; Inspection; Integrated circuit yield; Laser beams; Optical attenuators; Optical films; Optical materials; Optical pulses; Xenon;

fLanguage

English

Journal_Title

Quantum Electronics, IEEE Journal of

Publisher

ieee

ISSN

0018-9197

Type

jour

DOI

10.1109/JQE.1975.1068876

Filename

1068876