Title :
Enhancement of Kr2 excimer generation in a pulsed rare-gas jet discharge with H2 gas contact cooling
Author :
Itoh, T. ; Sunada, Y. ; Kannari, F.
Author_Institution :
Dept. of Electr. Eng., Keio Univ., Yokohama, Japan
fDate :
4/1/1994 12:00:00 AM
Abstract :
A novel excitation scheme for Kr2 rare-gas excimer formation is developed. A pulse discharge excited Kr jet is dynamically mixed with a H2 neutral gas flow located downstream in a vacuum chamber. Rapid contact cooling of the high temperature Kr plasma jet by H2 gas collisions increases the Kr2 excimer emission at 148 nm by a factor of more than three compared with that observed without the cooling downstream. Significant decreases of both electron temperature and density in the Kr plasma when mixed with H2 gases downstream are measured with time-resolved spectroscopic methods
Keywords :
discharges (electric); excimers; krypton; plasma collision processes; plasma density; plasma diagnostics; plasma jets; plasma temperature; 148 nm; H2; Kr; Kr plasma; Kr-H2; Kr2; contact cooling; density; electron temperature; excimer emission; excimer generation; excitation scheme; gas collisions; gas contact cooling; neutral gas flow; pulse discharge; pulsed rare-gas jet discharge; time-resolved spectroscopic methods; Cooling; Density measurement; Electrons; Fault location; Fluid flow; Gases; Plasma density; Plasma measurements; Plasma temperature; Spectroscopy;
Journal_Title :
Plasma Science, IEEE Transactions on
