Title :
Correction of mask defects by laser beam
Author :
Lee, Fred ; Mitchell, Jerome
Author_Institution :
RCA, Somerville, NJ, USA
fDate :
9/1/1975 12:00:00 AM
Keywords :
Glass; High speed optical techniques; Large scale integration; Laser beams; Microprocessors; Optical attenuators; Optical films; Optical materials; Optical pulses; Xenon;
Journal_Title :
Quantum Electronics, IEEE Journal of
DOI :
10.1109/JQE.1975.1068878
