Title :
A Flexible Ultrathin-Body Single-Photon Avalanche Diode With Dual-Side Illumination
Author :
Pengfei Sun ; Charbon, E. ; Ishihara, Ryoichi
Author_Institution :
Delft Inst. of Microsyst. & Nanoelectron., Delft Univ. of Technol., Delft, Netherlands
Abstract :
The world´s first flexible ultrathin-body dual-side illumination single-photon avalanche diode (SPAD) is reported with a peak photon detection probability of 11% in frontside-illumination (FSI) and 6% in backside-illumination modes, a dark count rate of 20 kHz and negligible afterpulsing and crosstalk. Compared with mainstream CMOS FSI SPAD, this device can be bent around a 10-mm-diameter cylinder and it is indicated in biomedical monitoring, implantable, and edible applications, as well as in antivignetting image sensors, bioinspired composite-eye, or flexible multiaperture cameras, and wherever the sensor plane must follow a certain curvature.
Keywords :
avalanche diodes; flexible electronics; lighting; CMOS FSI SPAD; antivignetting image sensors; backside-illumination mode; bioinspired composite-eye; biomedical monitoring application; dark count rate; dual-side illumination; edible application; flexible multiaperture cameras; flexible ultrathin-body single-photon avalanche diode; frequency 20 kHz; frontside-illumination mode; implantable application; peak photon detection probability; sensor plane; size 10 mm; Jitter; Junctions; Laser modes; Photonics; Polyimides; Silicon; Substrates; Flexible; dual-side illumination; single-photon avalanche diode (SPAD);
Journal_Title :
Selected Topics in Quantum Electronics, IEEE Journal of
DOI :
10.1109/JSTQE.2014.2342193
