DocumentCode :
1064100
Title :
Imaging performance of mercuric iodide polycrystalline films
Author :
Hartsough, Neal E. ; Iwanczyk, Jan S. ; Patt, Bradley E. ; Skinner, Nathan L.
Author_Institution :
Photon Imaging Inc., Northridge, CA, USA
Volume :
51
Issue :
4
fYear :
2004
Firstpage :
1812
Lastpage :
1816
Abstract :
Mercuric iodide (HgI2) polycrystalline films have great potential as direct-conversion X-ray detectors for digital X-ray imaging. We have optimized a sublimation-based film growth process to create uniform films up to 6.5 × 6.5 cm2 with very small (<25 μm) grain sizes on the readout side of the film. The growth techniques used can be easily extended to produce much larger film areas (>25 cm × 25 cm). Films grown on glass substrates uniformly coated with indium tin oxide (ITO) show low dark current and high sensitivity at low bias voltages: dark current of about 0.5 nA/cm2 and corresponding X-ray response of about 20 μC/R cm2 (bias 0.1 V/μm, X-ray tube settings 10 mA and 70 kVp, 2-mm Al filter). Additionally, films grown on patterned ITO on glass substrates showed a similar performance for pixel sizes of 10.2 to 4 mm2. The imaging performance results of a film grown directly on a 6.5 × 6.5 (cm2) thin-film transistor array with 127 μm × 127 μm pixels are presented.
Keywords :
X-ray detection; X-ray imaging; nuclear electronics; semiconductor counters; thin film transistors; 127 micron; 6.5 cm; HgI2 film; ITO; InSnO; X-ray response; X-ray tube setting; digital X-ray imaging; direct-conversion X-ray detector; glass substrate; grain size; high sensitivity; indium tin oxide coating; low bias voltage; low dark current; mercuric iodide polycrystalline film; patterned ITO; pixel size; readout side; sublimation-based film growth process; thin-film transistor array; uniform film growth; Dark current; Filters; Glass; Grain size; Indium tin oxide; Low voltage; Optical imaging; Substrates; X-ray detectors; X-ray imaging;
fLanguage :
English
Journal_Title :
Nuclear Science, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9499
Type :
jour
DOI :
10.1109/TNS.2004.832691
Filename :
1323773
Link To Document :
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