DocumentCode
1064369
Title
GaInAsP/InP Quantum Wire Lasers
Author
Arai, Shigehisa ; Maruyama, Takeo
Author_Institution
Quantum Nanoelectron. Res. Center, Tokyo Inst. of Technol., Tokyo
Volume
15
Issue
3
fYear
2009
Firstpage
731
Lastpage
742
Abstract
Present status of GaInAsP/InP long-wavelength quantum wire lasers, fabricated by a method using electron beam exposure, dry etching, and two-step organometallic vapor-phase epitaxy, is described from aspects of low-damage interface formation and size uniformity of quantum wire structures. Even though superior lasing properties attributed to sharper gain spectrum over that of quantum well structure have not been realized yet, polarization anisotropic feature of the quantum wire structure and formation of good interfaces by this fabrication method were confirmed. Single-wavelength lasers consisting of quantum wire structure as the active and/or the passive regions have been realized as possible candidates for future integrated photonics.
Keywords
electron beam lithography; etching; gallium arsenide; indium compounds; optical fabrication; quantum well lasers; semiconductor growth; semiconductor quantum wires; vapour phase epitaxial growth; GaInAsP-InP; dry etching; electron beam lithography; gain spectrum; laser fabrication; low-damage interface formation; quantum wire laser; single-wavelength laser; two-step organometallic vapor-phase epitaxy; Anisotropic magnetoresistance; Dry etching; Electron beams; Epitaxial growth; Indium phosphide; Optical device fabrication; Photonics; Polarization; Quantum well lasers; Wire; Distributed Bragg reflector (DBR) laser; GaInAsP/InP; distributed feedback (DFB) laser; distributed reflector (DR) laser; low-dimensional quantum well (QW) structure; polarization anisotropy; quantum wire laser;
fLanguage
English
Journal_Title
Selected Topics in Quantum Electronics, IEEE Journal of
Publisher
ieee
ISSN
1077-260X
Type
jour
DOI
10.1109/JSTQE.2008.2010872
Filename
5068482
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