Title :
GaInAsP/InP Quantum Wire Lasers
Author :
Arai, Shigehisa ; Maruyama, Takeo
Author_Institution :
Quantum Nanoelectron. Res. Center, Tokyo Inst. of Technol., Tokyo
Abstract :
Present status of GaInAsP/InP long-wavelength quantum wire lasers, fabricated by a method using electron beam exposure, dry etching, and two-step organometallic vapor-phase epitaxy, is described from aspects of low-damage interface formation and size uniformity of quantum wire structures. Even though superior lasing properties attributed to sharper gain spectrum over that of quantum well structure have not been realized yet, polarization anisotropic feature of the quantum wire structure and formation of good interfaces by this fabrication method were confirmed. Single-wavelength lasers consisting of quantum wire structure as the active and/or the passive regions have been realized as possible candidates for future integrated photonics.
Keywords :
electron beam lithography; etching; gallium arsenide; indium compounds; optical fabrication; quantum well lasers; semiconductor growth; semiconductor quantum wires; vapour phase epitaxial growth; GaInAsP-InP; dry etching; electron beam lithography; gain spectrum; laser fabrication; low-damage interface formation; quantum wire laser; single-wavelength laser; two-step organometallic vapor-phase epitaxy; Anisotropic magnetoresistance; Dry etching; Electron beams; Epitaxial growth; Indium phosphide; Optical device fabrication; Photonics; Polarization; Quantum well lasers; Wire; Distributed Bragg reflector (DBR) laser; GaInAsP/InP; distributed feedback (DFB) laser; distributed reflector (DR) laser; low-dimensional quantum well (QW) structure; polarization anisotropy; quantum wire laser;
Journal_Title :
Selected Topics in Quantum Electronics, IEEE Journal of
DOI :
10.1109/JSTQE.2008.2010872