DocumentCode
1065078
Title
Nanonewton Force Generation and Detection Based on a Sensitive Torsion Pendulum
Author
Chen, Sheng-Jui ; Pan, Sheau-Shi
Author_Institution
Center for Meas. Stand., Ind. Technol. Res. Inst., Hsinchu
Volume
58
Issue
4
fYear
2009
fDate
4/1/2009 12:00:00 AM
Firstpage
897
Lastpage
901
Abstract
In this paper, we introduce an experiment based on a sensitive torsion pendulum for measuring and calibrating small forces at the nanonewton scale. The force standard for calibration is the universal gravitation between four masses separated by known distances. It is realized by two test masses suspended as part of the torsion pendulum and two source masses on a rotation table. Two force-generation mechanisms, namely, the optical force from the radiation pressure and the electrostatic force by the capacitive actuation unit, are designed and will be calibrated by the gravitational force. We present our recent results on radiation pressure measurements and describe the design of the capacitive displacement sensing/actuating unit.
Keywords
calibration; capacitive sensors; electrostatics; force measurement; force sensors; radiation pressure; capacitive displacement sensing unit; electrostatic force; gravitational force; nanonewton force detection; nanonewton force generation; optical force; radiation pressure; sensitive torsion pendulum; universal gravitation; Active damping control; capacitive accelerometer; gravitational constant; nanonewton; radiation pressure; torsion pendulum;
fLanguage
English
Journal_Title
Instrumentation and Measurement, IEEE Transactions on
Publisher
ieee
ISSN
0018-9456
Type
jour
DOI
10.1109/TIM.2008.2011096
Filename
4749299
Link To Document