• DocumentCode
    1065078
  • Title

    Nanonewton Force Generation and Detection Based on a Sensitive Torsion Pendulum

  • Author

    Chen, Sheng-Jui ; Pan, Sheau-Shi

  • Author_Institution
    Center for Meas. Stand., Ind. Technol. Res. Inst., Hsinchu
  • Volume
    58
  • Issue
    4
  • fYear
    2009
  • fDate
    4/1/2009 12:00:00 AM
  • Firstpage
    897
  • Lastpage
    901
  • Abstract
    In this paper, we introduce an experiment based on a sensitive torsion pendulum for measuring and calibrating small forces at the nanonewton scale. The force standard for calibration is the universal gravitation between four masses separated by known distances. It is realized by two test masses suspended as part of the torsion pendulum and two source masses on a rotation table. Two force-generation mechanisms, namely, the optical force from the radiation pressure and the electrostatic force by the capacitive actuation unit, are designed and will be calibrated by the gravitational force. We present our recent results on radiation pressure measurements and describe the design of the capacitive displacement sensing/actuating unit.
  • Keywords
    calibration; capacitive sensors; electrostatics; force measurement; force sensors; radiation pressure; capacitive displacement sensing unit; electrostatic force; gravitational force; nanonewton force detection; nanonewton force generation; optical force; radiation pressure; sensitive torsion pendulum; universal gravitation; Active damping control; capacitive accelerometer; gravitational constant; nanonewton; radiation pressure; torsion pendulum;
  • fLanguage
    English
  • Journal_Title
    Instrumentation and Measurement, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9456
  • Type

    jour

  • DOI
    10.1109/TIM.2008.2011096
  • Filename
    4749299