Title :
Design and fabrication of annular arrays for high-frequency ultrasound
Author :
Brown, Jeremy A. ; Démoré, Christine E M ; Lockwood, Geoffrey R.
Author_Institution :
Dept. of Phys., Queen´´s Univ., Kingston, Ont., Canada
Abstract :
The design, fabrication, and performance of miniature high-frequency annular arrays are described. A 50-MHz, 2-mm-diameter, 7-element, equal-area annular array was fabricated and tested. The array elements were defined using photolithography and the electrical contacts were made using ultrasonic wire bonding. The resulting transducer produced pulses with a -6 dB bandwidth of 52% and an insertion loss of -16 dB. A radiation pattern was collected by scanning the transducer array above the tip of a glass fiber. A -6 dB two-way beam width of 75 microns was found at f/2. The radiation pattern decreased smoothly to less than -60 dB at a distance of 550 microns.
Keywords :
biomedical ultrasonics; echo; electrical contacts; lead bonding; photolithography; sputter deposition; ultrasonic transducer arrays; -16 dB; -6 dB; 2 mm; 50 MHz; 550 micron; 75 micron; annular array design; annular array fabrication; electrical contact; glass fiber; high frequency ultrasound; insertion loss; miniature high-frequency annular arrays; photolithography; radiation pattern; transducer array; two way beam width; ultrasonic wire bonding; Bandwidth; Bonding; Contacts; Fabrication; Lithography; Testing; Ultrasonic imaging; Ultrasonic transducer arrays; Ultrasonic transducers; Wire; Computer-Aided Design; Equipment Design; Equipment Failure Analysis; Reproducibility of Results; Sensitivity and Specificity; Transducers; Ultrasonography;
Journal_Title :
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
DOI :
10.1109/TUFFC.2004.1324405
