Title :
Measured resonance characteristics of a 2-GHz-fundamental quartz resonator
Author_Institution :
Dept. of Electr. & Commun. Eng., Tohoku Univ., Japan
Abstract :
I fabricated an inverted-mesa AT-cut quartz resonator in which the thickness of the vibrating area was adjusted to 0.6 /spl mu/m by wet etching, and I demonstrated the excitation of a fundamental thickness vibration of 2.074 GHz. This main mode was inductive, and Q was 1037. However, all inharmonic modes were capacitive.
Keywords :
crystal resonators; etching; 0.6 micron; 2 GHz; 2.074 GHz; Q-values; SiO/sub 2/; capacitive harmonic modes; inductive modes; inverted mesa AT-cut quartz resonator; resonance properties; vibration excitation; wet etching; Aluminum; Area measurement; Electrodes; Frequency; Jitter; Resonance; Stability; Thickness measurement; Vibration measurement; Wet etching;
Journal_Title :
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
DOI :
10.1109/TUFFC.2004.1324408
