Title :
Performance of a raster scanning laser display system using diamond shaped frame supported micromirror
Author :
Ji, Chang-Hyeon ; Choi, Moongoo ; Kim, Sang-Cheon ; Lee, See-Hyung ; Bu, Jong-Uk
Author_Institution :
MS Group, LG Electron. Inst. of Technol., Seoul
Abstract :
We describe the design, fabrication, and experimental results of a raster scanning laser display system using micromachined electrostatic scanning micromirror. The micromirror is comprised of a diaphragm mirror plate supported by an array of diamond shaped support frame, and movable comb electrodes. A prototype raster scanning laser display system using the fabricated micromirror, having optical scan angle of 16.9deg at resonance frequency of 19.55 kHz, as the horizontal scanner was developed and tested. To compensate for the nonlinear characteristics of the scanner, a simple image correction method was developed, and the projected image was analyzed and compared with the simulation results
Keywords :
display devices; electrostatic devices; laser beam applications; micromirrors; optical scanners; 19.55 kHz; diamond shaped frame; diamond shaped support frame; diaphragm mirror plate; electrostatic micromirror; horizontal scanner; image correction method; micromachined micromirror; movable comb electrodes; nonlinear scanner characteristics; optical scan angle; raster scanning laser display system; scanning micromirror; Displays; Electrodes; Electrostatics; Micromirrors; Mirrors; Nonlinear optics; Optical design; Optical device fabrication; Prototypes; Resonance; Laser display; raster scanning; scanning micromirror;
Journal_Title :
Photonics Technology Letters, IEEE
DOI :
10.1109/LPT.2006.879515
