Influence of electron collisions inside the cathode sheath upon the electron energy spectrum in the negative glow region of a gas discharge

Author

Shi, B. ; Fetzer, G.J. ; Yu, Z. ; Meyer, J.D. ; Collins, G.J.

Author_Institution

Dept. of Electr. Eng., Colorado State Univ., Fort Collins, CO, USA

Volume

25

Issue

5

fYear

1989

fDate

5/1/1989 12:00:00 AM

Firstpage

948

Lastpage

954

Abstract

Computer models developed to solve the Boltzmann equation for the electron energy spectrum in both the cathode sheath and the negative glow region of a glow discharge are discussed. Electron collisions occurring during acceleration inside the cathode sheath partially determine the structure of the electron energy distribution measured in the negative glow. The relative roles of elastic, excitation, and ionization collisions are examined using the computer model. Good qualitative agreement was obtained between calculated electron energy distributions and previous experimental measurements both at the sheath-plasma interface as well as in the negative glow region of the discharge.

Keywords

Boltzmann equation; cathodes; discharges (electric); plasma collision processes; plasma sheaths; Boltzmann equation; cathode sheath; computer model; elastic collisions; electron collisions; electron energy distribution; electron energy spectrum; excitation collisions; gas discharge; ionization collisions; negative glow region; sheath-plasma interface; Acceleration; Atomic measurements; Cathodes; Electrons; Energy measurement; Equations; Glow discharges; Ionization; Voltage;

fLanguage

English

Journal_Title

Quantum Electronics, IEEE Journal of

Publisher

ieee

ISSN

0018-9197

Type

jour

DOI

10.1109/3.27985

Filename

27985