• DocumentCode
    1065965
  • Title

    Defect Identification in Large Area Electronic Backplanes

  • Author

    Sambandan, Sanjiv ; Apte, Raj B. ; Wong, William S. ; Lujan, Rene ; Young, Michael ; Russo, Beverly ; Ready, S. ; Street, Robert A.

  • Author_Institution
    Palo Alto Res. Center, Electron. Mater. & Device Lab., Palo Alto, CA
  • Volume
    5
  • Issue
    1
  • fYear
    2009
  • Firstpage
    27
  • Lastpage
    33
  • Abstract
    We describe a rapid testing system for active matrix thin-film transistor (TFT) backplanes which enables the identification of many common processing defects. The technique spatially maps the charge feedthrough from TFTs in the pixel and is suited for pixels with switched-capacitor architecture.
  • Keywords
    flaw detection; semiconductor device testing; thin film transistors; active matrix thin-film transistor; defect identification; large area electronic backplanes; rapid testing system; switched-capacitor architecture; Backplanes; Circuit testing; Dielectric substrates; Electronic equipment testing; Image sensors; Plastics; Semiconductor materials; Silicon; System testing; Thin film transistors; Amorphous silicon; backplanes; defects; testing; thin-film transistor (TFT);
  • fLanguage
    English
  • Journal_Title
    Display Technology, Journal of
  • Publisher
    ieee
  • ISSN
    1551-319X
  • Type

    jour

  • DOI
    10.1109/JDT.2008.2004858
  • Filename
    4749391
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1065965