• DocumentCode
    1066026
  • Title

    Reflectance-difference spectroscopy: a new probe of crystal growth by MBE and OMCVD

  • Author

    Aspnes, D.E.

  • Author_Institution
    Bell Commun. Res. Inc., Red Bank, NJ, USA
  • Volume
    25
  • Issue
    5
  • fYear
    1989
  • fDate
    5/1/1989 12:00:00 AM
  • Firstpage
    1056
  • Lastpage
    1063
  • Abstract
    Reflectance-difference spectroscopy (RDS) is a normal-incidence optical technique that uses symmetry to enhance the typically low sensitivity of optical probes to surface phenomena. In RDS, the difference between reflectances parallel and perpendicular to the two principal optic axes in the plane of the surface is determined experimentally by modulation techniques. Contributions from the nearly isotropic bulk and randomly oriented surface species largely cancel in subtraction, preferentially leaving those from the lower symmetry surface. Being optical, RDS can be used in the reactive, relatively high-pressure sample ambients of organometallic chemical vapor deposition (OMCVD) reactors as well as the ultrahigh-vacuum sample environment of molecular beam epitaxy (MBE). MBE results for the (001) AlGaAs system show that reflectance-difference signals are sensitive to either surface chemistry or surface structure according to photon energy.
  • Keywords
    III-V semiconductors; aluminium compounds; chemical vapour deposition; gallium arsenide; light reflection; molecular beam epitaxial growth; spectroscopy; surface chemistry; surface structure; AlGaAs system; III-V semiconductors; MBE; OMCVD; RDS; crystal growth; molecular beam epitaxy; normal-incidence optical technique; organometallic chemical vapor deposition; principal optic axes; reflectance-difference spectroscopy; reflectances; surface chemistry; surface structure; Chemical vapor deposition; Molecular beam epitaxial growth; Optical films; Optical modulation; Optical scattering; Optical sensors; Photonic crystals; Plasma measurements; Probes; Spectroscopy;
  • fLanguage
    English
  • Journal_Title
    Quantum Electronics, IEEE Journal of
  • Publisher
    ieee
  • ISSN
    0018-9197
  • Type

    jour

  • DOI
    10.1109/3.28000
  • Filename
    28000