DocumentCode
1066026
Title
Reflectance-difference spectroscopy: a new probe of crystal growth by MBE and OMCVD
Author
Aspnes, D.E.
Author_Institution
Bell Commun. Res. Inc., Red Bank, NJ, USA
Volume
25
Issue
5
fYear
1989
fDate
5/1/1989 12:00:00 AM
Firstpage
1056
Lastpage
1063
Abstract
Reflectance-difference spectroscopy (RDS) is a normal-incidence optical technique that uses symmetry to enhance the typically low sensitivity of optical probes to surface phenomena. In RDS, the difference between reflectances parallel and perpendicular to the two principal optic axes in the plane of the surface is determined experimentally by modulation techniques. Contributions from the nearly isotropic bulk and randomly oriented surface species largely cancel in subtraction, preferentially leaving those from the lower symmetry surface. Being optical, RDS can be used in the reactive, relatively high-pressure sample ambients of organometallic chemical vapor deposition (OMCVD) reactors as well as the ultrahigh-vacuum sample environment of molecular beam epitaxy (MBE). MBE results for the (001) AlGaAs system show that reflectance-difference signals are sensitive to either surface chemistry or surface structure according to photon energy.
Keywords
III-V semiconductors; aluminium compounds; chemical vapour deposition; gallium arsenide; light reflection; molecular beam epitaxial growth; spectroscopy; surface chemistry; surface structure; AlGaAs system; III-V semiconductors; MBE; OMCVD; RDS; crystal growth; molecular beam epitaxy; normal-incidence optical technique; organometallic chemical vapor deposition; principal optic axes; reflectance-difference spectroscopy; reflectances; surface chemistry; surface structure; Chemical vapor deposition; Molecular beam epitaxial growth; Optical films; Optical modulation; Optical scattering; Optical sensors; Photonic crystals; Plasma measurements; Probes; Spectroscopy;
fLanguage
English
Journal_Title
Quantum Electronics, IEEE Journal of
Publisher
ieee
ISSN
0018-9197
Type
jour
DOI
10.1109/3.28000
Filename
28000
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