Title :
TA-A2 sheet resistivity reduction in polycrystalline silicon by pulsed laser and CW laser annealing
Author :
Shibata, Takuma ; Lee, K.F. ; Gibbons, J.F.
fDate :
11/1/1979 12:00:00 AM
Keywords :
Annealing; Conductivity; Contracts; Gallium arsenide; Laser stability; Optical pulses; Silicon; Surface emitting lasers; Surface morphology; Thermal resistance;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1979.19714
