DocumentCode

1066079

Title

TA-A2 sheet resistivity reduction in polycrystalline silicon by pulsed laser and CW laser annealing

Author

Shibata, Takuma ; Lee, K.F. ; Gibbons, J.F.

Volume

26

Issue

11

fYear

1979

fDate

11/1/1979 12:00:00 AM

Firstpage

1833

Lastpage

1833

Keywords

Annealing; Conductivity; Contracts; Gallium arsenide; Laser stability; Optical pulses; Silicon; Surface emitting lasers; Surface morphology; Thermal resistance;

fLanguage

English

Journal_Title

Electron Devices, IEEE Transactions on

Publisher

ieee

ISSN

0018-9383

Type

jour

DOI

10.1109/T-ED.1979.19714

Filename

1480292