Title :
Physical Modeling of MEMS Variable Inductor
Author :
Yammouch, Tackya ; Okada, Kenichi ; Masu, Kazuya
Author_Institution :
Tokyo Inst. of Technol., Integrated Res. Inst., Yokohama
fDate :
5/1/2008 12:00:00 AM
Abstract :
In this study, we propose a new equivalent circuit model of variable inductors. We have proposed variable inductors with metal plate moving with a microelectromechanical system (MEMS) actuator. The proposed model consists of a conventional single-pi model, networks for silicon substrate and metal plate flowing eddy current, and coupling coefficients between these networks. The model is verified by fitting with measured data. Error in inductance and value is less than plusmn5%.
Keywords :
inductors; microactuators; MEMS variable inductor; equivalent circuit model; microelectromechanical system actuator; silicon substrate; Equivalent circuit; RF circuit; inductor; microelectromechanical system (MEMS); physical model; reconfigurable; wide-band;
Journal_Title :
Circuits and Systems II: Express Briefs, IEEE Transactions on
DOI :
10.1109/TCSII.2007.914443
