Titanium Based Transition Edge Microcalorimeters for Optical Photon Measurements

Transition edge sensor microcalorimeters can be used in many optical quantum measurements because of its low dark counts, high quantum efficiency, and high resolving power of a photon number in weak light pulses. In order to increase count rates up to a few MHz, we have developed a titanium transition edge sensor for the optical measurements, and its performances were analysed. Titanium is one of the ideal superconductor because of its higher transition temperature and lower optical reflectance at 1.5 wavelength. Our titanium film was fabricated with electron-beam evaporation, and showed high residual resistance ratio of 3.5. The sharp superconducting transition also was found at 359 mK, which is close to the critical temperature in bulk. The fabricated device showed a fast response to pulsed laser illumination of 1.5 wavelength with the fall time constant of 300 ns. These features are very promising for high-speed single photon detection in many quantum optical measurements.