Title :
WP-A2 Effects of Cr redistribution on device characteristics in ion-implanted GaAs IC´s fabricated with semi-insulating GaAs
Author :
Asbeck, P. ; Tandon, J. ; Babcock, E. ; Welch, Benjamin ; Deline, V.R.
fDate :
11/1/1979 12:00:00 AM
Keywords :
Annealing; Capacitance-voltage characteristics; Chromium; Displays; Electric variables; Gallium arsenide; Insulation; Integrated circuit measurements; Passivation; Surface treatment;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1979.19771
