Title :
WP-A1 redistribution of chromium upon post-implant annealing of selenium-implanted GaAs
Author :
Deline, V.R. ; Sigmon, T.W. ; Lidow, A.
fDate :
11/1/1979 12:00:00 AM
Keywords :
Annealing; Atomic measurements; Chromium; Gallium arsenide; Gettering; Implants; Ion implantation; Laboratories; Substrates; Temperature;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1979.19773
