Response mechanism of SiC-based MOS field-effect gas sensors

SiC-based field-effect gas sensors with catalytic platinum electrodes (Pt-MOSiC) have been subjected to a series of gas response measurements. Structural analysis of the Pt electrodes revealed that the gas sensitivity and the selectivity of Pt-MOSiC gas sensors depend on two major parameters: the porosity and the catalytic activity of the Pt electrodes. Pt-MOSiC gas sensors with thick, dense Pt electrodes only exhibit hydrogen sensitivity, whereas Pt-MOSiCs with thin porous gates exhibit a broad range of gas sensitivities similar to resistive metal-oxide gas sensors. A model is put forward that explains the nonhydrogen gas response of Pt-MOSiC devices and of conventional polycrystalline metal-oxide materials on a common basis.