DocumentCode
1066776
Title
WP-B6 silicon cantilever beam accelerometer utilizing a PI-FET capacitive transducer
Author
Chen, Peng ; Muller, R.S. ; Shiosaki, T. ; White, Richard M.
Volume
26
Issue
11
fYear
1979
fDate
11/1/1979 12:00:00 AM
Firstpage
1857
Lastpage
1857
Keywords
Accelerometers; Aluminum; Anisotropic magnetoresistance; Laboratories; Piezoelectric films; Piezoelectric transducers; Silicon compounds; Sputter etching; Structural beams; Zinc oxide;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/T-ED.1979.19782
Filename
1480360
Link To Document