Title :
WP-B6 silicon cantilever beam accelerometer utilizing a PI-FET capacitive transducer
Author :
Chen, Peng ; Muller, R.S. ; Shiosaki, T. ; White, Richard M.
fDate :
11/1/1979 12:00:00 AM
Keywords :
Accelerometers; Aluminum; Anisotropic magnetoresistance; Laboratories; Piezoelectric films; Piezoelectric transducers; Silicon compounds; Sputter etching; Structural beams; Zinc oxide;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1979.19782
