Title :
RF triode-sputtered mercury cadmium telluride thin films
Author :
Cornely, Roy H. ; Suchow, Lawrence ; Gabara, Thaddeus ; Diodato, Philip ; Cornely, R.H. ; Suchow, L. ; Gabara, T. ; Diodato, P.
Author_Institution :
New Jersey Institute of Technology, Newark, NJ
fDate :
1/1/1980 12:00:00 AM
Abstract :
Experimental results presented for (Hg0.75Cd0.25)Te film deposited on silicon substrates indicate that large-area photodiode detector arrays on electronically active substrates can be made by RF triode-sputtering large-area (25.5-cm2) pressed-powder targets with mercury ions. Films with the same composition as the target were obtained using either a homogenized powder mixture of CdTe and HgTe or a powder ground from a polycrystalline (Hg0.75Cd0.25)Te ingot. X-ray diffraction measurements shows that as-deposited polycrystalline films can have 100-percent
Keywords :
Cadmium compounds; Mercury (metals); Photodiodes; Powders; Radio frequency; Semiconductor films; Silicon; Substrates; Tellurium; Transistors;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1980.19814
