• DocumentCode
    1067117
  • Title

    RF triode-sputtered mercury cadmium telluride thin films

  • Author

    Cornely, Roy H. ; Suchow, Lawrence ; Gabara, Thaddeus ; Diodato, Philip ; Cornely, R.H. ; Suchow, L. ; Gabara, T. ; Diodato, P.

  • Author_Institution
    New Jersey Institute of Technology, Newark, NJ
  • Volume
    27
  • Issue
    1
  • fYear
    1980
  • fDate
    1/1/1980 12:00:00 AM
  • Firstpage
    29
  • Lastpage
    32
  • Abstract
    Experimental results presented for (Hg0.75Cd0.25)Te film deposited on silicon substrates indicate that large-area photodiode detector arrays on electronically active substrates can be made by RF triode-sputtering large-area (25.5-cm2) pressed-powder targets with mercury ions. Films with the same composition as the target were obtained using either a homogenized powder mixture of CdTe and HgTe or a powder ground from a polycrystalline (Hg0.75Cd0.25)Te ingot. X-ray diffraction measurements shows that as-deposited polycrystalline films can have 100-percent
  • Keywords
    Cadmium compounds; Mercury (metals); Photodiodes; Powders; Radio frequency; Semiconductor films; Silicon; Substrates; Tellurium; Transistors;
  • fLanguage
    English
  • Journal_Title
    Electron Devices, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9383
  • Type

    jour

  • DOI
    10.1109/T-ED.1980.19814
  • Filename
    1480607
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1067117