• DocumentCode
    1067531
  • Title

    Demonstration of blazing effect in detuned second order gratings

  • Author

    Hagberg, M. ; Eriksson, N. ; Kjellberg, T. ; Larsson, A.G.

  • Author_Institution
    Dept. of Optoelectron. & Electr. Meas., Chalmers Univ. of Technol., Goteborg
  • Volume
    30
  • Issue
    7
  • fYear
    1994
  • fDate
    3/31/1994 12:00:00 AM
  • Firstpage
    570
  • Lastpage
    571
  • Abstract
    Surface-emitting InGaAs/AlGaAs lasers with two first order gratings as feedback elements followed by one detuned second order blazed grating as output window were fabricated using electron beam lithography and chemically assisted ion beam etching. A strong dependence of the surface emission efficiency on the blazed grating orientation was observed
  • Keywords
    III-V semiconductors; aluminium compounds; diffraction gratings; electron beam lithography; gallium arsenide; indium compounds; semiconductor lasers; sputter etching; InGaAs-AlGaAs; blazed grating orientation; blazing effect; chemically assisted ion beam etching; detuned second order blazed grating; detuned second order gratings; electron beam lithography; feedback elements; first order gratings; output window; surface emission efficiency; surface-emitting InGaAs/AlGaAs lasers;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:19940381
  • Filename
    280606
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1067531