DocumentCode
1067723
Title
Computer analysis of breakdown mechanism in planar power MOSFET´s
Author
Ochi, Shikayuki ; Okabe, Takeaki ; Yoshida, Isao ; Yamaguchi, Ken ; Nagata, Minoru
Author_Institution
Hitachi Ltd., Kokubunji, Tokyo, Japan
Volume
27
Issue
2
fYear
1980
fDate
2/1/1980 12:00:00 AM
Firstpage
399
Lastpage
400
Abstract
Breakdown mechanism in planar power MOSFET´s having high breakdown voltage is investigated. Precise electric field distribution is obtained by two-dimensional numerical analysis. This field distribution is used to optimize device structure and to predict breakdown voltage. A technique for reducing the electric field on the silicon surface by equalizing its distribution is presented.
Keywords
Avalanche breakdown; Electric breakdown; Impurities; MOSFET circuits; Numerical analysis; Power MOSFET; Rain; Silicon; Surface resistance; Voltage;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/T-ED.1980.19874
Filename
1480667
Link To Document