Title :
Memory array architecture and decoding scheme for 3 V only sector erasable DINOR flash memory
Author :
Kobayashi, Shin-ichi ; Nakai, Hiroaki ; Kunori, Yuichi ; Nakayama, Takeshi ; Miyawaki, Yoshikazu ; Terada, Yasushi ; Onoda, Hiroshi ; Ajika, Natsuo ; Hatanaka, Masahiro ; Miyoshi, Hirokazu ; Yoshihara, Tsutomu
Author_Institution :
ULSI Lab., Mitsubishi Electr. Corp., Itami, Japan
fDate :
4/1/1994 12:00:00 AM
Abstract :
A memory array architecture and row decoding scheme for a 3 V only DINOR (divided bit line NOR) flash memory has been designed. A new sector organization realizes one word line driver per two word lines, which is conformable to tight word line pitch. A hierarchical negative voltage switching row decoder and a compact source line driver have been developed for 1 K byte sector erase without increasing the chip size. A bit-by-bit programming control and a low threshold voltage detection circuit provide a high speed random access time at low Vcc and a narrow program threshold voltage distribution. A 4 Mb DINOR flash memory test device was fabricated from 0.5 μm, double-layer metal, triple polysilicon, triple well CMOS process. The cell measures 1.8×1.6 μm2 and the chip measures 5.8×5.0 mm 2. The divided bit line structure realizes a small NOR type memory cell
Keywords :
CMOS integrated circuits; EPROM; PLD programming; decoding; integrated memory circuits; memory architecture; 0.5 micron; 3 V; 4 Mbit; DINOR; NOR type memory cell; Si; bit-by-bit programming control; compact source line driver; divided bit line NOR type; double-layer metal process; flash memory; hierarchical negative voltage switching row decoder; high speed random access time; low threshold voltage detection circuit; memory array architecture; row decoding scheme; sector erasable type; sector organization; triple polysilicon process; triple well CMOS process; word line driver; Channel hot electron injection; Circuit testing; Decoding; Driver circuits; Flash memory; Memory architecture; Semiconductor device measurement; Threshold voltage; Tunneling; Voltage control;
Journal_Title :
Solid-State Circuits, IEEE Journal of