Title :
UMOS transistors on
Author :
Ammar, Elie S. ; Rodgers, T.J. ; Rodgers, T.J.
Author_Institution :
Stanford University, Stanford, CA
fDate :
5/1/1980 12:00:00 AM
Abstract :
When common V-groove etching techniques are applied to
Keywords :
Anisotropic magnetoresistance; Capacitance; Circuits; Epitaxial layers; Etching; Fabrication; Helium; Large scale integration; Scalability; Silicon;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1980.19955
