A Prototype Magnetically Levitated Superconducting Conveyer

Author

Mori, Takashi ; Inoue, Atsushi ; Komori, Mochimitsu

Author_Institution

Kyushu Inst. of Technol., Fukuoka

Volume

17

Issue

2

fYear

2007

fDate

6/1/2007 12:00:00 AM

Firstpage

2170

Lastpage

2173

Abstract

A new type of magnetically levitated superconducting conveyer for wafer transportation is proposed. At present, wafer fabrication process is carried out in clean rooms. Magnetically levitated conveyer without any mechanical contacts is most useful in such clean rooms. Our system is designed to levitate wafers on a levitated stage with permanent magnets. Vibrations are suppressed by using PD (proportional and differential) control. This paper discusses a prototype magnetically levitated superconducting conveyer, its simulation results and its experimental results.

Keywords

clean rooms; conveyors; high-temperature superconductors; magnetic levitation; permanent magnet machines; superconducting machines; clean rooms; differential control; levitated stage; magnetically levitated superconducting conveyer; permanent magnets; proportional control; wafer fabrication process; wafer transportation; Magnetic flux; Magnetic levitation; Magnetic sensors; Permanent magnets; Prototypes; Sensor systems; Superconducting coils; Superconducting magnetic energy storage; Superconducting magnets; Voltage; Conveyer; magnetic bearing; magnetic levitation; pinning effect; repulsive force; superconductor;

fLanguage

English

Journal_Title

Applied Superconductivity, IEEE Transactions on

Publisher

ieee

ISSN

1051-8223

Type

jour

DOI

10.1109/TASC.2007.898895

Filename

4277611