Title :
External cavity laser with a vertically etched silicon blazed grating
Author :
Lohmann, A. ; Syms, R.R.A.
Author_Institution :
Dept. of Electr. & Electron. Eng., Imperial Coll., London, UK
Abstract :
An external cavity laser based on a stripe waveguide semiconductor optical amplifier, a ball lens, and a blazed diffraction grating fabricated by vertical deep reactive ion etching of silicon is demonstrated. Bandpass characteristics for a 12th-order grating are given. Tuning of an external cavity laser over a 120-nm spectral range is demonstrated, with a maximum single-mode fiber-coupled power of 1 mW and side-mode suppression ratio of 30 dB.
Keywords :
diffraction gratings; laser cavity resonators; laser modes; laser tuning; lenses; micro-optics; optical fabrication; semiconductor optical amplifiers; sputter etching; surface emitting lasers; waveguide lasers; 1 mW; Si; ball lens; bandpass characteristics; blazed diffraction grating; external cavity laser tuning; maximum single-mode fiber-coupled power; side-mode suppression ratio; spectral range; stripe waveguide semiconductor optical amplifier; vertical deep reactive ion etching; vertically etched silicon blazed grating; Etching; Gratings; Laser tuning; Lenses; Optical waveguides; Semiconductor lasers; Semiconductor optical amplifiers; Semiconductor waveguides; Silicon; Waveguide lasers;
Journal_Title :
Photonics Technology Letters, IEEE
DOI :
10.1109/LPT.2002.805762
