DocumentCode :
1069287
Title :
A proposed slotted mask for direct deposition of metal contact pattern on MIS solar cells
Author :
Nguyen, Huy Binh ; Nguyen, Hien B.
Author_Institution :
University of Miami, Coral Gables, FL, USA
Volume :
27
Issue :
7
fYear :
1980
fDate :
7/1/1980 12:00:00 AM
Firstpage :
1303
Lastpage :
1304
Abstract :
It is proposed that by using anisotropic etching of
Keywords :
Anisotropic magnetoresistance; Capacitance; Electron devices; Etching; Photonic band gap; Photovoltaic cells; Resists; Silicon; Solid state circuits; Upper bound;
fLanguage :
English
Journal_Title :
Electron Devices, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9383
Type :
jour
DOI :
10.1109/T-ED.1980.20027
Filename :
1480820
Link To Document :
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