• DocumentCode
    1069352
  • Title

    Changes in stress and coercivity after annealing of amorphous Co(Zr, Nb) thin films deposited by RF sputtering

  • Author

    Materne, A. ; Moriceau, H. ; Blanchard, Brent ; Florestan, J.

  • Author_Institution
    CEA/IRDI/BP, Grenoble, France
  • Volume
    24
  • Issue
    2
  • fYear
    1988
  • fDate
    3/1/1988 12:00:00 AM
  • Firstpage
    1752
  • Lastpage
    1754
  • Abstract
    The variations of the coercivity and the stress of low-magnetostriction Co(Zr, Nb) thin films are investigated, for various values of the sputtering gas pressure, PAr, before and after annealing at 300 degrees C. The origin of the stresses and their implications for the coercivity and the anisotropy are discussed on the basis of inert gas incorporation, morphological features, and relaxation effects.
  • Keywords
    annealing; cobalt alloys; coercive force; magnetic anisotropy; magnetic properties of amorphous substances; magnetic thin films; niobium alloys; sputtered coatings; zirconium alloys; CoNbZr; amorphous sputtered thin films; anisotropy; annealing; coercivity; inert gas incorporation; morphological features; relaxation effects; sputtering gas pressure; stress; Amorphous materials; Anisotropic magnetoresistance; Annealing; Argon; Coercive force; Niobium; Radio frequency; Sputtering; Substrates; Tensile stress;
  • fLanguage
    English
  • Journal_Title
    Magnetics, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9464
  • Type

    jour

  • DOI
    10.1109/20.11591
  • Filename
    11591
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1069352