Title :
New micromachined membrane switches in silicon technology
Author :
Hiltmann, Kai ; Schumacher, Axel ; Guttmann, Kai ; Lemp, Engelbert ; Sandmaier, Hermann ; Lang, Walter
Author_Institution :
HSG-IMIT, Villingen, Germany
fDate :
9/1/2002 12:00:00 AM
Abstract :
Presents a new generation of micromachined membrane switches containing a glass substrate and a silicon membrane. Upon external actuation, two planar substrate contacts are closed by a metal layer deposited on the switching membrane. The switching position is constant to better than 1 μm and has been observed to move about 0.7 μm over the achieved lifetime of 20 million electromechanical cycles under electrical loads of 12 V and 10 mA.
Keywords :
micromachining; microswitches; semiconductor switches; 10 mA; 12 V; Si; electrical loads; electromechanical cycles; external actuation; micromachined membrane switches; planar substrate contacts; switching membrane; switching position; Biomembranes; Contacts; Etching; Glass; Manufacturing; Relays; Semiconductor thin films; Silicon; Substrates; Switches;
Journal_Title :
Components and Packaging Technologies, IEEE Transactions on
DOI :
10.1109/TCAPT.2002.804611
