Title :
SRC collaborations paving the way
Author :
Hillenius, Steven ; Herr, Dan ; Weitzman, Betsy ; Welser, Jeffrey
Abstract :
SRC has a 25-year history of supporting university research to benefit the semiconductor industry. Current research programs are heavily invested in nanotechnology research to supply solutions to patterning, manufacturing control, and device design problems that are potential barriers to continued productivity and applications for semiconductors.
Keywords :
nanopatterning; nanotechnology; research and development; semiconductor technology; SRC collaborations; Semiconductor Research Corporation; nanopatterning; nanotechnology research; semiconductor industry; university research; CMOS integrated circuits; Collaboration; Fellows; Government; Lifting equipment; Manufacturing industries; Nanoelectronics; Nanotechnology; Portfolios; Semiconductor materials;
Journal_Title :
Nanotechnology Magazine, IEEE
DOI :
10.1109/MNANO.2007.912096
