Title :
Magnetostriction of sputtered Sm-Fe thin films
Author :
Honda, T. ; Hayashi, Y. ; Arai, K.I. ; Ishiyama, K. ; Yamaguchi, M.
Author_Institution :
Tokin Corp., Sendai, Japan
fDate :
11/1/1993 12:00:00 AM
Abstract :
The magnetostriction and the magnetic properties of amorphous Sm xFe100-x thin films prepared by sputtering are investigated at room temperature. The magnetostriction, -λ, of these films increases rapidly in low fields (<1 kOe) and reaches the maximum values of 300-400×10-6 at 16 kOe for x=30-40. These results suggest that Sm-Fe thin films could be used for microactuators. The magnetic properties of Sm-Fe thin films do not show clear dependence on the sputtering conditions, such as input power, Ar gas pressure, and substrate temperature
Keywords :
amorphous state; coercive force; ferromagnetic properties of substances; iron alloys; magnetic properties of amorphous substances; magnetic thin films; magnetostriction; samarium alloys; sputtered coatings; Ar gas pressure; amorphous SmxFe100-x thin films; input power; magnetic properties; magnetostriction; microactuators; sputtered Sm-Fe thin films; sputtering conditions; substrate temperature; Amorphous magnetic materials; Amorphous materials; Magnetic anisotropy; Magnetic films; Magnetic properties; Magnetostriction; Perpendicular magnetic anisotropy; Saturation magnetization; Soft magnetic materials; Sputtering;
Journal_Title :
Magnetics, IEEE Transactions on
