Title :
Fabrication of Nb variable-thickness- and point-contact-type bridges by means of microfabrication technology
Author :
Gamo, K. ; Harada, T. ; Arimoto, K. ; Namba, S.
Author_Institution :
Osaka University, Toyonaka, Osaka, Japan
fDate :
10/1/1980 12:00:00 AM
Abstract :
Niobium-based techniques for fabrication of two different types of metal-coupled Josephson junctions are presented. Electrical characteristics are reported and it is noted that the device resistance is an order of magnitude or more higher than would be expected for both devices.
Keywords :
Bridge circuits; Chromium; Fabrication; Gold; Insulation; Niobium; Plasma applications; Radio frequency; Resists; Sputter etching;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1980.20143
