• DocumentCode
    1070789
  • Title

    MA-13 silicon-on-insulator device structures

  • Author

    Tasch, A.F.

  • Volume
    27
  • Issue
    11
  • fYear
    1980
  • fDate
    11/1/1980 12:00:00 AM
  • Firstpage
    2176
  • Lastpage
    2176
  • Keywords
    CMOS technology; Costs; Instruments; Insulation; MESFETs; Microwave circuits; Microwave devices; Parasitic capacitance; Silicon on insulator technology; Very large scale integration;
  • fLanguage
    English
  • Journal_Title
    Electron Devices, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9383
  • Type

    jour

  • DOI
    10.1109/T-ED.1980.20174
  • Filename
    1480967
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1070789