• DocumentCode
    1070864
  • Title

    MP-A4 high-performance scaled MOS process suitable for micrometer channel VLSI devices

  • Author

    Shah, Parikshit

  • Volume
    27
  • Issue
    11
  • fYear
    1980
  • fDate
    11/1/1980 12:00:00 AM
  • Firstpage
    2178
  • Lastpage
    2178
  • Keywords
    Doping; Electron mobility; Large scale integration; MOS devices; Scattering; Semiconductor process modeling; Transconductance; Velocity measurement; Very large scale integration; Voltage;
  • fLanguage
    English
  • Journal_Title
    Electron Devices, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9383
  • Type

    jour

  • DOI
    10.1109/T-ED.1980.20180
  • Filename
    1480973
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1070864