Title :
TA-A5 scaling and limits of monolithic polycrystalline silicon resistors
Author :
Gerzberg, L. ; Lu, N.C.C. ; Meindl, J.D.
fDate :
11/1/1980 12:00:00 AM
Keywords :
Conductivity; Grain size; Laboratories; Linearity; Read-write memory; Resistors; Silicon; Size control; Temperature sensors; Voltage;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1980.20195
