DocumentCode

1071016

Title

TA-A5 scaling and limits of monolithic polycrystalline silicon resistors

Author

Gerzberg, L. ; Lu, N.C.C. ; Meindl, J.D.

Volume

27

Issue

11

fYear

1980

fDate

11/1/1980 12:00:00 AM

Firstpage

2184

Lastpage

2184

Keywords

Conductivity; Grain size; Laboratories; Linearity; Read-write memory; Resistors; Silicon; Size control; Temperature sensors; Voltage;

fLanguage

English

Journal_Title

Electron Devices, IEEE Transactions on

Publisher

ieee

ISSN

0018-9383

Type

jour

DOI

10.1109/T-ED.1980.20195

Filename

1480988