Title :
TP-A4 direct writing of micrometer-sized highly doped regions on semiconductors by UV-laser photodeposition
Author :
Ehrlich, D.J. ; Osgood, R.M. ; Deutsch, T.F.
fDate :
11/1/1980 12:00:00 AM
Keywords :
Frequency; Gas lasers; Laboratories; Ohmic contacts; Optical surface waves; Semiconductor device doping; Semiconductor lasers; Surface emitting lasers; Tin; Writing;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1980.20209
