Title :
TP-A5 nonalloyed ohmic contacts to n-GaAs by CW laser-assisted diffusion from a SnO2/SiO2source
Author :
Nissim, Y.I. ; Gibbons, J.F. ; Gold, R.B.
fDate :
11/1/1980 12:00:00 AM
Keywords :
Annealing; Contact resistance; Crystalline materials; FETs; Gallium arsenide; Gold; Ohmic contacts; Optical microscopy; Power lasers; Tin;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1980.20210
