Title :
WA-A1 functional integration of bipolar and MOS structures
fDate :
11/1/1980 12:00:00 AM
Keywords :
Annealing; Delay effects; FETs; Impurities; Ion implantation; MOS devices; MOSFET circuits; Solid state circuits; Switches; Thyristors;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1980.20223
