Title :
WA-A6 amorphous silicon integrated circuit
Author :
Matsumura, Mieko ; Hayama, Hirofumi
fDate :
11/1/1980 12:00:00 AM
Keywords :
Amorphous silicon; Etching; FET integrated circuits; Glass; Integrated circuit interconnections; Inverters; MOSFET circuits; Parasitic capacitance; Predictive models; Voltage;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1980.20225
