DocumentCode :
1071386
Title :
Electromechanical considerations in developing low-voltage RF MEMS switches
Author :
Peroulis, Dimitrios ; Pacheco, Sergio P. ; Sarabandi, Kamal ; Katehi, Linda P B
Author_Institution :
Electr. Eng. & Comput. Sci. Dept., Univ. of Michigan, Ann Arbor, MI, USA
Volume :
51
Issue :
1
fYear :
2003
fDate :
1/1/2003 12:00:00 AM
Firstpage :
259
Lastpage :
270
Abstract :
This paper reports on the design, fabrication, and testing of a low-actuation voltage Microelectromechanical systems (MEMS) switch for high-frequency applications. The mechanical design of low spring-constant folded-suspension beams is presented first, and switches using these beams are demonstrated with measured actuation voltages of as low as 6 V. Furthermore, common nonidealities such as residual in-plane and gradient stress, as well as down-state stiction problems are addressed, and possible solutions are discussed. Finally, both experimental and theoretical data for the dynamic behavior of these devices are presented. The results of this paper clearly underline the need of an integrated design approach for the development of ultra low-voltage RF MEMS switches.
Keywords :
internal stresses; low-power electronics; microswitches; stiction; 6 V; electromechanical characteristics; folded suspension beam; low-voltage RF MEMS switch; mechanical design; residual stress; spring constant; stiction; Fabrication; Low voltage; Mechanical variables measurement; Microelectromechanical systems; Micromechanical devices; Radiofrequency microelectromechanical systems; Residual stresses; Stress measurement; Switches; System testing;
fLanguage :
English
Journal_Title :
Microwave Theory and Techniques, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9480
Type :
jour
DOI :
10.1109/TMTT.2002.806514
Filename :
1159639
Link To Document :
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