Title :
The calculation of the impedance of an induction plasma installation by a hybrid finite-element boundary-element method
Author :
Fouladgar, Javad ; Chentouf, J. Fouladgar A
Author_Institution :
Lab. de Recherche de Tech. Inductives, Saint-Nazaire, France
fDate :
11/1/1993 12:00:00 AM
Abstract :
A hybrid finite-element, boundary-element (FE-BE) analysis in a RF induction plasma is developed to predict the current distribution in an inductor and a plasma and to calculate the impedance of an entire installation. The electromagnetic and heat transfer equations are solved by the FE method inside the plasma, and the BE method is used to calculate the boundary conditions. To preserve the sparse and positive definite matrix structure of the FE method, an iterative algorithm is used to solve the coupled matrix equations
Keywords :
boundary-elements methods; boundary-value problems; current distribution; eddy currents; electric impedance; electromagnetic fields; finite element analysis; iterative methods; plasma devices; plasma simulation; plasma transport processes; EM equations; ICP torch; RF induction plasma; boundary conditions; coupled matrix equations; current distribution; eddy currents; heat transfer equations; hybrid finite-element boundary-element method; impedance; induction plasma installation; iterative algorithm; Current distribution; Electromagnetic heating; Equations; Finite element methods; Impedance; Inductors; Iron; Plasmas; Radio frequency; Sparse matrices;
Journal_Title :
Magnetics, IEEE Transactions on
