Title :
An axially symmetric finite element model for the electromagnetic behaviour of an RF plasma device
Author :
Mekideche, M.R. ; Feliachi, M.
Author_Institution :
LRT CRTT, Saint-Nazaire, France
fDate :
11/1/1993 12:00:00 AM
Abstract :
A finite element analysis for the electromagnetic field in an RF plasma system with a quartz confinement tube is presented. The effect of motion and heat on plasma electrical conductivity is taken into account by coupling heat, flow and electromagnetic equations within an iterative method
Keywords :
boundary-value problems; eddy currents; electromagnetic fields; finite element analysis; iterative methods; plasma devices; plasma simulation; plasma transport processes; 2D axisymmetric model; ICP; RF plasma system; axially symmetric finite element model; eddy current density; electromagnetic behaviour; electromagnetic equations; flow equations; heat equations; induction plasma; iterative method; plasma device modelling; plasma electrical conductivity; plasma torch; quartz confinement tube; Conductivity; Electromagnetic analysis; Electromagnetic coupling; Electromagnetic fields; Electromagnetic heating; Electromagnetic modeling; Finite element methods; Plasma confinement; Radio frequency; Resistance heating;
Journal_Title :
Magnetics, IEEE Transactions on
