WP-A5 oxidation studies of WSi2and PdSi formed by scanned laser-beam reaction

Author

Shibata, Takuma ; Sigmon, T.W. ; Gibbons, J.F. ; Mohammadi, Farah ; Saraswat, Krishna C.

Volume

Issue

fYear

1980

fDate

11/1/1980 12:00:00 AM

Firstpage

2199

Lastpage

2200

Keywords

Boron; Conductivity; Laboratories; Oxidation; Schottky diodes; Silicon; Solid state circuits; Substrates; Very large scale integration; X-ray lasers;

fLanguage

English

Journal_Title

Electron Devices, IEEE Transactions on

Publisher

ieee

ISSN

0018-9383

Type

DOI

10.1109/T-ED.1980.20240

Filename

1481033

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