DocumentCode :
1071473
Title :
WP-A5 oxidation studies of WSi
2
and PdSi formed by scanned laser-beam reaction
Author :
Shibata, Takuma ; Sigmon, T.W. ; Gibbons, J.F. ; Mohammadi, Farah ; Saraswat, Krishna C.
Volume :
27
Issue :
11
fYear :
1980
fDate :
11/1/1980 12:00:00 AM
Firstpage :
2199
Lastpage :
2200
Keywords :
Boron; Conductivity; Laboratories; Oxidation; Schottky diodes; Silicon; Solid state circuits; Substrates; Very large scale integration; X-ray lasers;
fLanguage :
English
Journal_Title :
Electron Devices, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9383
Type :
jour
DOI :
10.1109/T-ED.1980.20240
Filename :
1481033
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=1071473
