DocumentCode
1071477
Title
Variable MEMS capacitors implemented into RF filter systems
Author
Borwick, Robert L., III ; Stupar, Philip A. ; DeNatale, Jeffrey F. ; Anderson, Robert ; Erlandson, Robert
Author_Institution
Rockwell Sci. Center, USA
Volume
51
Issue
1
fYear
2003
fDate
1/1/2003 12:00:00 AM
Firstpage
315
Lastpage
319
Abstract
A microelectromechanical systems analog tunable capacitor has been designed and fabricated for implementation into a two-pole UHF filter. Recent developments on the capacitor have improved the RF device performance significantly, and have resulted in improved UHF filter performance. In the 225-400-MHz range that this device is intended for, Q values are in excess of 100. In addition, an 8.4 : 1 tuning ratio has been achieved with continuous tuning over a 1.4 : 11.9-pF range. When implemented into a two-pole UHF filter, tuning over the entire 225-400-MHz range was achieved with a loss under 6.2 dB.
Keywords
Q-factor; UHF filters; capacitors; circuit tuning; micromechanical devices; 1.4 to 11.9 pF; 225 to 400 MHz; 6.2 dB; Q-factor; RF filter; analog tunable capacitor; tuning ratio; two-pole UHF filter; variable MEMS capacitor; Aluminum; Capacitors; Electrostatics; Filters; Micromechanical devices; Radio frequency; Silicon; Thermal resistance; Tuning; Varactors;
fLanguage
English
Journal_Title
Microwave Theory and Techniques, IEEE Transactions on
Publisher
ieee
ISSN
0018-9480
Type
jour
DOI
10.1109/TMTT.2002.806519
Filename
1159646
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