Title :
MEMS switchable interdigital coplanar filter
Author :
Fourn, Erwan ; Pothier, Arnaud ; Champeaux, Corinne ; Tristant, Pascal ; Catherinot, Alain ; Blondy, Pierre ; Tanné, Gérard ; Rius, Eric ; Person, Christian ; Huret, Fabrice
Author_Institution :
Lab. d´´Electronique et Systemes de Telecommun., Univ. de Bretagne Occidentale, Brest, France
fDate :
1/1/2003 12:00:00 AM
Abstract :
This paper presents a tunable interdigital coplanar filter with tapped-line feedings. Microelectromechanical systems capacitors are used as a high contrast capacitive switch between a quarter-wavelength resonator and an open-ended stub to perform the frequency shift. A two-pole tunable filter with a 13% relative bandwidth has been designed, fabricated, and measured. The center frequency can be switched from 18.5 to 21.05 GHz with low return losses (less than 15 dB) and low insertion losses (3.5 dB).
Keywords :
circuit tuning; coplanar waveguide components; micromechanical devices; waveguide filters; 15 dB; 18.5 to 21.05 GHz; 3.5 dB; MEMS capacitor; MEMS switchable interdigital coplanar filter; insertion loss; open-ended stub; quarter-wavelength resonator; return loss; tapped-line feeding; two-pole tunable filter; Biomembranes; Capacitance; Capacitors; Electrodes; Frequency; Microelectromechanical systems; Micromechanical devices; Microwave filters; Switches; Tunable circuits and devices;
Journal_Title :
Microwave Theory and Techniques, IEEE Transactions on
DOI :
10.1109/TMTT.2002.806517
