DocumentCode :
1071690
Title :
Correction of differential capacitance profiles for Debye-length effects
Author :
Wilson, Charles L.
Author_Institution :
National Bureau of Standards, Washington, DC
Volume :
27
Issue :
12
fYear :
1980
fDate :
12/1/1980 12:00:00 AM
Firstpage :
2262
Lastpage :
2267
Abstract :
Conventional differential capacitance-voltage ( 
) profiling methods are limited in resolution by the method used to convert data to profile data. A new method of numerical calculation of data, using cubic finite elements, is presented which allows a more exact relationship between data and profile data to be calculated. This new method of data reduction allows the resolution of differential profiling method to be extended to dimensions near the local extrinsic Debye length.
) profiling methods are limited in resolution by the method used to convert data to profile data. A new method of numerical calculation of data, using cubic finite elements, is presented which allows a more exact relationship between data and profile data to be calculated. This new method of data reduction allows the resolution of differential profiling method to be extended to dimensions near the local extrinsic Debye length.Keywords :
Capacitance; Capacitance-voltage characteristics; Charge carrier density; Data analysis; Electrostatic measurements; Finite element methods; Impurities; Length measurement; Semiconductor diodes; Voltage;
fLanguage :
English
Journal_Title :
Electron Devices, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9383
Type :
jour
DOI :
10.1109/T-ED.1980.20262
Filename :
1481054
Link To Document :
