Title :
Industrial pattern inspection using a laser/microprocessor system
Author :
Tanaka, T. ; Hirakawa, Yuki ; Marutani, Y. ; Nagata, I.
Author_Institution :
Osaka Prefectural Industrial Research Institute, Osaka, Japan
fDate :
9/1/1977 12:00:00 AM
Keywords :
Digital systems; Flowcharts; Fourier transforms; Image converters; Inspection; Microcomputers; Microprocessors; Optical films; Optical sensors; Shape;
Journal_Title :
Quantum Electronics, IEEE Journal of
DOI :
10.1109/JQE.1977.1069581
