DocumentCode

1072209

Title

Laser coupling: A new technique for measurement of refractive index and thickness of oxide and nitride films on silicon

Author

Schinke, D. ; Smith, Ross ; MacKenzie, D.

Author_Institution

Bell Telephone Lab., Inc., Murray Hill, NJ, USA

Volume

13

Issue

9

fYear

1977

fDate

9/1/1977 12:00:00 AM

Firstpage

816

Lastpage

817

Keywords

Drilling; Gas lasers; Optical coupling; Optical films; Power lasers; Reflectivity; Refractive index; Semiconductor films; Silicon; Thickness measurement;

fLanguage

English

Journal_Title

Quantum Electronics, IEEE Journal of

Publisher

ieee

ISSN

0018-9197

Type

jour

DOI

10.1109/JQE.1977.1069622

Filename

1069622